The concept of oil-free vacuum pump is quite old. At the beginning of the 20th century, there has been a special li of Vortex Technology in the world. However, due to the limitation of the technical level at that time, the vortex oil-free vacuum pump mechanism could not be manufactured, and the concept of vortex was forgotten. In 1973, the vortex mechanism was lifted again and a model mechanism was manufactured, which made the practical application of this technology possible. The potential and great advantages of vortex mechanism, such as high reliability, stable operation, extremely low noise, energy saving, etc., immediately attracted the attention and urgent needs of the refrigerator industry, which was greatly favored by industry leaders and quickly put into industrial application. The scroll compressor technology and products of famous companies such as trance, Hitachi, Copland, etc. have led the tide of the world's practical application of scroll technology, driving the technological progress and product upgrading of many industries such as refrigerators and air conditioners.
Today, vortex technology has been extended from its initial application in the compressor industry to the vacuum pump manufacturing industry, realizing the practicality of vortex clean vacuum acquisition technology with oil-free vacuum pump, more stable operation, lower noise and more energy saving. People have applied the concept and principle of vortex to produce a series of single-stage and two-stage vortex oil-free vacuum pumps that do not pollute the vacuum application instruments and equipment and the environment, and whose pumping speed, service life, energy consumption and other indicators are better than ordinary oil pumps.
In the early 1990s, the world's first vortex vacuum pump was introduced to the market, and vortex technology began to be popularized and applied worldwide as a new vacuum acquisition technology. So far, the manufacturers of vortex vacuum pumps in the world are concentrated in the United States, Japan and Europe, represented by anest1wata in Japan, Varian in the United States and bush in Germany. The products include 0.25L / s-1ol / S series products, and some products with 15L / s or greater extraction capacity are also in the experimental stage.
Characteristics and application fields of 0-ifreescrollvacuum pump
A clean vacuum environment has always been the ideal vacuum environment pursued by scientists and business circles. Since the creation of vacuum environment, people have tried to use different means to achieve the effect of cleaning vacuum. Up to now, clean vacuum equipment has been developed to condensate pumps, column pumps, claw pumps, vortex pumps, diaphragm pumps and other products. Among the existing oil-free vacuum pumps, compared with other types of oil-free vacuum pumps, vortex oil-free vacuum pumps have the characteristics of stable operation, low noise, energy saving, light weight and small volume, and have been widely used in the following scientific research and production fields: thin film preparation equipment in semiconductor industry, semiconductor device packaging equipment; Vacuum furnace, nano material preparation equipment and vacuum detection equipment in vacuum metallurgy industry; Synchrotron radiation beam lines, electron microscopes, analytical and testing instruments in the scientific instrument industry; Medical equipment, dental instruments, dialysis machines; Material purification and drug preparation in biological products industry; Packaging industry food, medicine, biological products and other packaging equipment.
The working principle, technical indexes of scroll oil-free vacuum pump and its comparison with ordinary oil pump
The scroll disk of scroll oil-free vacuum pump is one or several involute spirals connected with a plane at one end to form a scroll disk structure. A pair of scroll plates composed of a static scroll plate and a moving scroll plate constitute the basic pumping mechanism of scroll oil-free vacuum. For example, in a two-stage scroll oil-free vacuum pump, there are fixed scroll disks corresponding to two directions, and a rotating scroll disk located between the two scroll disks. The relative movement of the dynamic and static scroll plates of the oil-free vacuum pump forms a crescent shaped true cavity with constantly changing volume, which makes the gas inhale from the suction port, discharge from the exhaust port, and complete the exhaust cycle.